Nexsa G2 Surface Analysis System

Significance of the Topic

Surface analysis is essential for understanding the chemical and electronic properties of materials at the outermost atomic layers and interfaces. Accurate characterization of thin films, coatings, nanostructures and device surfaces underpins advances in microelectronics, energy storage, catalysis and materials quality control. By combining multiple spectroscopic techniques in one platform, researchers can obtain comprehensive, depth‐resolved information on composition, bonding states and electronic structure.

Study Objectives and Overview

This document presents the Thermo Scientific Nexsa G2 Surface Analysis System, a fully automated X-ray Photoelectron Spectroscopy (XPS) platform that integrates complementary spectroscopies for holistic surface and interface characterization. Key goals include improving throughput through rapid pump-down and detection, enhancing sensitivity and spatial resolution, enabling depth profiling with reproducible etch rates, and simplifying complex workflows with unified software control.

Methodology and Instrumentation

The Nexsa G2 System employs a micro-focused, monochromated Al Kα X-ray source with software-adjustable spot sizes from 10 µm to 400 µm, coupled to a full 180° hemispherical analyzer with a 128-channel detector. A patented dual-beam charge compensation unit ensures stable analysis of insulating specimens. Depth profiling is achieved using either the EX06 monatomic ion source (200–4,000 eV) or the MAGCIS gas cluster ion source (2,000–8,000 eV cluster beam), both offering automated configuration and reproducible etch rates. Optional modules support ion scattering spectroscopy (ISS), reflected electron energy loss spectroscopy (REELS), UV photoelectron spectroscopy (UPS) and molecular analysis via iXR Raman spectroscopy.

Instrumentation Used

• Micro-focused, monochromated Al Kα X-ray source (10–400 µm spot, water-cooled anode)
• Hemispherical analyzer (1–400 eV pass energy, mu-metal shielding, position-sensitive detector)
• Dual-beam electron/ion charge compensation (0–5 eV beam energy)
• Ion sources: EX06 monatomic (200–4,000 eV) and MAGCIS gas cluster (monatomic 500–4,000 eV; clusters 2,000–8,000 eV, 75–2,000 atoms)
• Optional co-incident modules: ISS, REELS, UPS, iXR Raman Spectrometer
• Avantage Data System with remote operation, automated calibration, and Maps™ Software integration
• Automated sample stage: azimuthal/compucentric rotation, heating, bias application and vacuum transfer
• Comprehensive vacuum system with turbomolecular pumps, bake-out, and full-range gauging

Key Results and Discussion

The Nexsa G2 delivers fast sample pump-down and data acquisition without compromising sensitivity or resolution. Variable spot sizing allows targeted analysis of micron-scale features, while automated depth profiling yields reproducible interface chemistry information. Integrated spectroscopies enable simultaneous collection of elemental, chemical state, electronic and molecular data, enhancing understanding of complex materials such as 2D layers, polymers and biomaterials. Software-driven alignment and calibration routines reduce user intervention and ensure consistent results across experiments and operators.

Benefits and Practical Applications

• High-throughput XPS for routine and high-demand laboratories
• Charge-neutralized analysis of insulators, powders and fibers
• Depth profiling of multilayer structures with controlled etch rates
• Co-incident spectroscopies supporting comprehensive material characterization
• In situ heating and bias studies for operando investigations
• Remote operation and collaboration via desktop sharing or web conferencing

Future Trends and Applications

Next-generation surface analysis will focus on deeper integration of imaging, machine-learning aided data interpretation, and ultra-fast operando measurements. Advances in cluster ion sources, environmental control and automated workflows will broaden applicability to real-world processes such as battery cycling, corrosion studies and advanced nanofabrication. Cloud-based data management and AI-driven pattern recognition promise to accelerate insights and support predictive materials design.

Conclusion

The Thermo Scientific Nexsa G2 System represents a versatile, high-performance platform for surface and interface analysis. By uniting advanced XPS with complementary spectroscopies and automated sample handling, it streamlines complex experiments and delivers reproducible, high-quality data for a wide range of research and quality control applications.