Sub-ppb detection limits for hydride gas contaminants using GC-ICP-QQQ
Applications | 2015 | Agilent TechnologiesInstrumentation
GC, Speciation analysis, ICP/MS/MS
IndustriesEnergy & Chemicals , Semiconductor Analysis
ManufacturerAgilent Technologies
Key wordssulfide, icp, ppb, qqq, gas, carbonyl, cell, phosphine, silane, omega, cos, hydride, using, semiconductor, low, exit, petrochemical, level, scanlon, anticipation, calibration, were, geiger, supplied, transistors, oxygen, value, diluter, standard, integration, mass, contaminants, industry, hydrogen, purity, production, measuring, demanded, william, multipoint, based, deleterious, reaction, used, performance, either, qms, backgrounds, background, digit
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