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Sub-ppb detection limits for hydride gas contaminants using GC-ICP-QQQ

Applications | 2015 | Agilent TechnologiesInstrumentation
GC, Speciation analysis, ICP/MS/MS
Industries
Energy & Chemicals , Semiconductor Analysis
Manufacturer
Agilent Technologies
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Agilent ICP-MS Journal July/August 2015 – Issue 62 Inside this Issue 2-3 New! Solution-ready Agilent 7800 ICP-MS 4-5 Sub-ppb Detection Limits for Hydride Gas Contaminants using GC-ICP-QQQ 6 Agilent MAPs: Innovative New Services Benefit Customers in EMEAI 7 Software Tips…
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Application Note Semiconductor Determination of Trace Impurities in Electronic Grade Arsine by GC-ICP-QQQ Sub-ppb detection limits for hydride gas contaminants using a single column, single injection volume, and multi-tune method Authors Introduction William M. Geiger, Blake McElmurry, Jesus Anguiano1 Mark…
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Applications of ICP-MS Measuring Inorganic Impurities in Semiconductor Manufacturing Application Compendium > Return to table of contents > Search entire document Table of contents ICP-MS and ICP-QQQ in the Semiconductor Industry 4 Agilent Has Three Decades of ICP-MS Experience Driving…
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CHEMICAL & ENERGY ANALYSIS ANALYSIS OF PROPYLENE IMPURITIES USING SELECT LOW SULFUR COLUMN AND SINGLE TUNE WITH GC-ICP-MS QQQ ORS Solutions for Your Analytical Business Markets and Applications Programs Author William M. Geiger Blake McElmurry Jesus Anguiano CONSCI, Ltd. Pasadena,…
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