Sub-ppb detection limits for hydride gas contaminants using GC-ICP-QQQ

Applications | 2015 | Agilent TechnologiesInstrumentation
GC, Speciation analysis, ICP/MS/MS
Industries
Energy & Chemicals , Semiconductor Analysis
Manufacturer
Agilent Technologies
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Application NoteSemiconductorDetermination of Trace Impuritiesin Electronic Grade Arsine byGC-ICP-QQQSub-ppb detection limits for hydride gascontaminants using a single column, single injectionvolume, and multi-tune methodAuthorsIntroductionWilliam M. Geiger, BlakeMcElmurry, Jesus Anguiano1Mark Kelinske2Most electronic devices use silicon-based semiconductors. However certainapplications can benefit from alternative...
Key words
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CHEMICAL & ENERGY ANALYSISANALYSIS OF PROPYLENE IMPURITIES USINGSELECT LOW SULFUR COLUMN AND SINGLE TUNEWITH GC-ICP-MS QQQ ORSSolutions for Your Analytical BusinessMarkets and Applications ProgramsAuthorWilliam M. GeigerBlake McElmurryJesus AnguianoCONSCI, Ltd. Pasadena, Texas, USAAbstractThere are a number of impurities that are of...
Key words
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Applications of ICP-MSMeasuring Inorganic Impuritiesin Semiconductor ManufacturingApplication Compendium > Return to table of contents> Search entire documentTable of contentsICP-MS and ICP-QQQ in the Semiconductor Industry4Agilent Has Three Decades of ICP-MS Experience DrivingContinuous Innovation7Agilent ICP-MS Solutions for the Semiconductor Industry8Automating Analysis of...
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Agilent ICP-MS JournalJuly/August 2015 – Issue 62Inside this Issue2-3New! Solution-ready Agilent 7800 ICP-MS4-5Sub-ppb Detection Limits for Hydride Gas Contaminantsusing GC-ICP-QQQ6Agilent MAPs: Innovative New Services BenefitCustomers in EMEAI7Software Tips and Tricks: Migrating to ICP-MSMassHunter 4.2 – Why You Should Consider Makingthe...
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