Measuring Inorganic Impurities in Semiconductor Manufacturing
Guides | 2022 | Agilent TechnologiesInstrumentation
GC, ICP/MS, Speciation analysis, ICP/MS/MS
IndustriesSemiconductor Analysis
ManufacturerAgilent Technologies
Key wordsreturn, contents, icp, table, cps, ppt, gas, semiconductor, conc, qqq, bec, document, entire, search, mode, cell, frequency, elements, min, cool, particle, element, plasma, ultratrace, flow, analysis, trace, silicon, size, wafer, omega, mass, normalized, contamination, purity, metal, sample, depth, sampling, bias, becs, signal, high, impurities, chemicals, metallic, qms, phosphine, time, process
Similar PDF
Handbook of ICP-QQQ Applications using the Agilent 8800 and 8900
2022|Agilent Technologies|Guides
5th EditionHandbook of ICP-QQQApplications using theAgilent 8800 and 8900Primer> Return to table of contents> Search entire documentForewordAgilent Technologies launched its 8800 Triple QuadrupoleICP-MS (ICP-QQQ) at the 2012 Winter Conference on PlasmaSpectrochemistry in Tucson, Arizona, USA.By the time the first ICP-QQQ...
Key words
return, returncontents, contentstable, tableicp, icpqqq, qqqcps, cpsgas, gasmass, massdocument, documentcell, cellppt, pptconc, concentire, entiresearch, searchelements
Automated Analysis of Semiconductor Grade Hydrogen Peroxide and DI Water using ICP-QQQ
2018|Agilent Technologies|Applications
Application NoteSemiconductorAutomated Analysis of SemiconductorGrade Hydrogen Peroxide and DI Waterusing ICP-QQQOnline MSA calibration using prepFAST S automatedsample introduction and Agilent 8900 ICP-QQQAuthorsKazuhiro SakaiAgilent Technologies, JapanAustin SchultzElemental Scientific, USAIntroductionMaximizing product yield and performance of semiconductor devices requiresmanufacturers to address the potential...
Key words
gas, gasprepfast, prepfastcool, coolsemiconductor, semiconductoricp, icpelements, elementsbec, becmsa, msaautomated, automatedqqq, qqqconc, concultratrace, ultratraceupw, upwsample, sampletune
ICP-QQQ Applications in Geochemistry, Mineral Analysis, and Nuclear Science
2022|Agilent Technologies|Guides
Applications of ICP-MSICP-QQQ Applications inGeochemistry, Mineral Analysis,and Nuclear ScienceApplication Compendium> Return to table of contents> Search entire documentExplore New Opportunities in Geochemistry,Mineral Analysis, and Nuclear Science With theAgilent 8900 ICP-QQQAgilent atomic spectroscopy instruments are known for their robustness,excellent control of...
Key words
return, returncontents, contentstable, tableicp, icpree, reeqqq, qqqmass, masscps, cpscell, cellgas, gasshift, shiftelement, elementybo, yborare, rarewwtp
Ultrapure Process Chemicals Analysis by ICP-QQQ with Hot Plasma Conditions
2021|Agilent Technologies|Applications
Application NoteSemiconductorUltrapure Process Chemicals Analysisby ICP-QQQ with Hot PlasmaConditionsMeeting single- and sub-ppt guideline levels forASTM/SEMI elements in ultrapure water using anAgilent 8900 ICP-QQQAuthorsKazuhiro Sakai and YoshinoriShimamuraAgilent Technologies, Inc.IntroductionContamination control is critical in semiconductor device fabrication (FAB) facilities(1). Contaminants may be...
Key words
semiconductor, semiconductorppt, pptbecs, becsdls, dlselements, elementsicp, icpbec, becultratrace, ultratraceplasma, plasmaeie, eieastm, astmcontaminants, contaminantsupw, upwbackgrounds, backgroundssemi