Determination of Trace Impurities in Electronic Grade Arsine by GC-ICP-QQQ
Aplikace | 2020 | Agilent TechnologiesInstrumentation
GC, ICP/MS, Speciační analýza, ICP/MS/MS
IndustriesPolovodiče
ManufacturerAgilent Technologies
Key wordsgermane, arsine, phosphine, silane, sulfide, icp, hydrogen, gas, integration, hydride, dopants, time, qqq, gallium, standard, dls, cell, area, interferences, semiconductor, kinetic, analyte, epilayers, used, best, arsenide, discrimination, argon, mass, limits, tune, using, entrainment, appeal, iii, compounds, multiplication, acquisition, modes, removal, single, dopant, contaminants, purity, dilution, impurities, measure, noise, deliberately, mode
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