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Agilent ICP-MS Journal (December 2016 – Issue 67)

Others | 2016 | Agilent TechnologiesInstrumentation
ICP/MS, Speciation analysis, ICP/MS/MS
Industries
Environmental, Semiconductor Analysis
Manufacturer
Agilent Technologies
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Determination of trace elements in ultrapure semiconductor grade sulfuric acid using the Agilent 8900 ICP-QQQ in MS/MS mode Application note Semiconductor Authors Michiko Yamanaka, Kazuo Yamanaka and Naoki Sugiyama, Agilent Technologies, Japan Introduction In the semiconductor industry, it is extremely…
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