Multielement Nanoparticle Analysis of Semiconductor Process Chemicals Using spICP-QQQ
Applications | 2019 | Agilent TechnologiesInstrumentation
ICP/MS, ICP/MS/MS
IndustriesSemiconductor Analysis
ManufacturerAgilent Technologies
Key wordscps, frequency, nanoparticle, particle, count, normalized, tmah, size, element, sec, intensity, signal, nanoparticles, time, nebulization, single, analysis, multiple, using, icp, measured, spicp, multielement, multi, blank, rapid, nps, measurement, semiconductor, software, sample, module, solutions, uptake, qqq, efficiency, asphaltene, signals, photoresist, acquisition, michiko, kanto, min, elements, yamanaka, interference, data, settle, contamination, rate
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