ICPMS
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Spectrophotometric Spatial Profiling of Coated Optical Wafers

Applications
| 2020 | Agilent Technologies
NIR Spectroscopy, UV–VIS spectrophotometry
Instrumentation
NIR Spectroscopy, UV–VIS spectrophotometry
Manufacturer
Agilent Technologies
Industries
Materials Testing

Automated Surface Analysis of Metal Contaminants in Silicon Wafers by Online VPD-ICP-MS/MS

Applications
| 2023 | Agilent Technologies
ICP/MS, ICP/MS/MS
Instrumentation
ICP/MS, ICP/MS/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis

Direct Analysis of Metallic Impurities in SiC and GaN Wafers by LA-GED-MSAG-ICP-MS/MS

Applications
| 2023 | Agilent Technologies
ICP/MS, ICP/MS/MS, Laser ablation
Instrumentation
ICP/MS, ICP/MS/MS, Laser ablation
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis

Coated Wafer Mapping Using UV-Vis Spectral Reflection and Transmission Measurements

Applications
| 2020 | Agilent Technologies
NIR Spectroscopy, UV–VIS spectrophotometry
Instrumentation
NIR Spectroscopy, UV–VIS spectrophotometry
Manufacturer
Agilent Technologies
Industries
Materials Testing, Semiconductor Analysis

Determination of ultratrace elements on silicon wafer surfaces using the Thermo Scientific iCAP TQs ICP-MS

Applications
| 2018 | Thermo Fisher Scientific
ICP/MS, ICP/MS/MS
Instrumentation
ICP/MS, ICP/MS/MS
Manufacturer
Thermo Fisher Scientific
Industries
Semiconductor Analysis

Thermo Scientific ICP-MS solutions for the semiconductor industry

Brochures and specifications
| 2018 | Thermo Fisher Scientific
ICP/MS, ICP/MS/MS
Instrumentation
ICP/MS, ICP/MS/MS
Manufacturer
Thermo Fisher Scientific
Industries
Semiconductor Analysis

Monitoring quality parameters in standard cleaning baths

Applications
| 2020 | Metrohm
NIR Spectroscopy
Instrumentation
NIR Spectroscopy
Manufacturer
Metrohm
Industries
Energy & Chemicals

Characterization of Surface Metal Contamination on Silicon Wafers Using Surface Metal Extraction Inductively Coupled Plasma Mass Spectrometry (SME- ICP-MS)

Applications
| 2001 | Agilent Technologies
ICP/MS
Instrumentation
ICP/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis

Agilent ICP-MS Journal (April 2018. Issue 72)

Others
| 2018 | Agilent Technologies
ICP/MS, ICP/MS/MS
Instrumentation
ICP/MS, ICP/MS/MS
Manufacturer
Agilent Technologies
Industries
Food & Agriculture, Semiconductor Analysis

Online monitoring of sulfuric acid and hydrogen peroxide using Raman spectroscopy

Applications
| 2023 | Metrohm
RAMAN Spectroscopy
Instrumentation
RAMAN Spectroscopy
Manufacturer
Metrohm
Industries
Semiconductor Analysis
Other projects
GCMS
LCMS
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