The Thermo Scientific ESCALAB™ QXi XPS Microprobe is the latest development in our renowned ESCALAB product line. The ESCALAB QXi XP Microprobe is designed as an expandable, multi-technique platform with unparalleled flexibility and configurability. System control, data acquisition, processing and reporting are seamlessly integrated by the powerful Thermo Scientific Avantage Data System for surface analysis.
Monochromated XPS analysis and HAXPES
The twin-crystal, micro-focusing monochromator has a 500 mm Rowland circle, uses an Al anode (or a dual Al and Ag anode with the dual monochromator option for automated switching from XPS to HAXPES), and allows you to select any sample spot size ranging from 200 µm to 900 µm.
Thermo Scientific ESCALAB QXi XPS Microprobe
Spectroscopy imaging
The lens and analyzer system on the ESCALAB QXi XPS Microprobe incorporates the Deflector Lens, enabling fast parallel imaging. Two detector systems: one optimized for spectroscopy and one for parallel imaging, consisting of a pair of channel plates and a continuous position-sensitive detector.
Thermo Scientific ESCALAB QXi XPS Microprobe
Charge neutralisation in XPS analysis
An electron source, co-axial with the analyzer input lens, is used for charge compensation when analyzing non-conducting samples with the monochromatic X-ray source, while a second flood source produces both low-energy ions to assist in providing effective charge compensation and low-energy electrons when the magnetic lens is not in use.
Thermo Scientific ESCALAB QXi XPS Microprobe
XPS ion gun
The ESCALAB QXi XPS Microprobe has two options for rapid, high-resolution depth profiling: the standard EX06 ion gun, which is optimized for monatomic ion sputtering and ion scattering spectroscopy, and the optional monatomic and gas cluster ion source, the Thermo Scientific MAGCIS Dual Beam Ion Source, which is capable of monatomic ion profiling, cluster ion profiling, and ion scattering spectroscopy.
Thermo Scientific ESCALAB QXi XPS Microprobe
Avantage Software
All analytical functions are controlled from Thermo Scientific Avantage Software, meaning that the entire analysis process can be performed remotely, if required. Avantage Software includes Knowledge View, a comprehensive source of tutorials and reference material that guide users through analysis.
Thermo Scientific ESCALAB QXi XPS Microprobe
XPS sample handling and alignment
All axes of movement on the sample stage are controlled by Avantage Software. With the auto-exchange system, samples can be exchanged from the preparation chamber to the load-lock automatically for a continuous sample flow. A high-resolution digital video camera is fitted to the instrument and is accurately aligned with the analysis position. XPS parallel imaging can also be used to locate features for analysis.
Thermo Scientific ESCALAB QXi XPS Microprobe
Multi-technique capabilities
The ESCALAB QXi XPS Microprobe includes ISS and REELS, which complement XPS, as standard. Additional analytical options, including UPS, AES, HAXPES, Raman, and IPES, can be added to provide a tailored solution to meet your experimental needs.
Thermo Scientific ESCALAB QXi XPS Microprobe
XPS instrument alignment and calibration
A calibration sample block, which has samples of copper, silver, and gold, is supplied for assessing sensitivity, setting the linearity of the analyzer energy scale, calibrating the ion source, aligning the X-ray monochromator, and determining the transmission function of the analyzer.
Thermo Scientific ESCALAB QXi XPS Microprobe
Vacuum system
The analysis chamber is constructed from 5 mm-thick mu-metal to maximize the efficiency of the magnetic shielding, and the chamber is pumped using both a turbomolecular pump and a titanium sublimation pump, allowing the analysis chamber to achieve a vacuum better than 5 × 10⁻¹⁰ mbar.
Thermo Scientific ESCALAB QXi XPS Microprobe
XPS sample preparation chambers
The standard Preploc chamber, which is a combined sample entry lock and preparation chamber, has ports that accommodate a variety of sample preparation devices, such as heating and cooling probes, ion guns, high-pressure gas cells, sample parking, and gas admission.
Thermo Scientific ESCALAB QXi XPS Microprobe
Beyond XPS, the ESCALAB QXi XPS Microprobe is a true multi-technique system, with ion scattering spectroscopy (ISS) and reflected electron energy loss spectroscopy (REELS) included as standard. Additional options such as HAXPES, AES, UPS, Raman, and IPES allow you to tailor the platform to your research needs. With versatile sample preparation capabilities and seamless integration with other vacuum hardware, the ESCALAB QXi is the surface analysis instrument designed to meet the most demanding research requirements.
Thermo Scientific - The full spectrum of surface analysis
