On-Line TOC Analyzer for Ultrapure Water TOC-1000e S

Significance of the Topic

Ultrapure water quality is critical in modern semiconductor fabrication, where trace organic impurities can impair device performance and yield. With shrinking feature sizes, detection of hard-to-oxidize compounds such as urea is increasingly important to prevent subsequent process issues.

Objectives and Overview of the Study

This application note presents the development and key features of the Shimadzu TOC-1000e S on-line Total Organic Carbon (TOC) analyzer, tailored for monitoring ultrapure water within semiconductor manufacturing lines. Incorporating semiconductor industry feedback, the instrument aims to achieve exceptional sensitivity, rapid response, compact installation, and user-friendly operation.

Methodology and Instrumentation

The TOC-1000e S employs a UV oxidation–conductivity detection method, using a mercury-free excimer lamp at 172 nm within an Active-Path™ configuration to ensure complete oxidation of organic substances. A conductivity sensor measures resulting carbon species. The analyzer features a simplified flow path to minimize carryover and contamination. Key attributes include:

• High-energy excimer lamp for sensitive detection of urea and other recalcitrant organics
• Continuous sample flow (30–200 mL/min) enabling real-time monitoring
• Lightweight (3 kg) and compact footprint (270×180×140 mm) suitable for desktop, wall, or pole mounting
• Optional vial sampler for on-site calibration with certified standards

Main Results and Discussion

Performance highlights are:

• Detection limit of 0.02 mg/L and linearity (R2 ≥ 0.98) across the 0–500 mg/L range
• Response cycle programmable from 5 to 30 minutes for rapid detection of contamination excursions
• User-replaceable excimer lamp and pump head with annual maintenance intervals
• Data export via USB in CSV or PDF, analog/contact outputs, and web browser interface for remote access

Benefits and Practical Applications

The TOC-1000e S provides continuous, high-sensitivity monitoring that prevents semiconductor defects, optimizes yield, and reduces downtime. Its compact design and flexible installation support integration into existing ultrapure water lines. Simplified maintenance and on-site calibration capabilities enhance laboratory efficiency and quality control processes.

Future Trends and Opportunities

Integration with IoT, machine-to-machine communication, and AI-driven diagnostics will enable predictive maintenance and autonomous operation. Expanded applications may include pharmaceutical water systems, power plant feedwater monitoring, and other industries requiring stringent organic contamination control.

Conclusion

Shimadzu’s TOC-1000e S combines advanced UV oxidation technology, real-time detection, and user-friendly design to meet the rigorous demands of ultrapure water monitoring in semiconductor manufacturing. It supports high yield rates and process reliability through sensitive, fast, and flexible TOC analysis.

Reference

Shimadzu Corporation. On-Line TOC Analyzer for Ultrapure Water: TOC-1000e S. Application Note C391-E120, First Edition November 2025.