Online Measurement of Ultra-pure Water Using TOC-1000e

Importance of the Topic

Maintaining ultra-pure water quality is critical in semiconductor and pharmaceutical manufacturing to prevent contamination and ensure process reliability. Real-time monitoring of total organic carbon (TOC) at sub-ppb levels helps detect trace organic impurities before they impact product quality or equipment performance.

Objectives and Study Overview

This study demonstrates the application of the Shimadzu TOC-1000e online analyzer for continuous monitoring of ultra-pure water. Key objectives include verifying detection sensitivity, evaluating data stability over extended periods, and illustrating integration with laboratory information systems for centralized data management.

Methodology and Instrumentation

The TOC-1000e employs a UV oxidation-conductivity method using a 172 nm excimer lamp rather than mercury lamps. Shimadzu’s Active-Path™ design aligns the lamp and sample flow path to maximize UV energy transfer and ensure complete oxidation of organic compounds. A standard sucrose calibration curve (0–500 ppb) was used. Measurements were taken every 10 minutes, with a dynamic range up to 500 ppb and a lower detection limit of 0.1 µg/L.

Main Results and Discussion

Continuous 24-hour monitoring revealed TOC levels consistently between 4.7 and 5.0 ppb. Conductivity and temperature were likewise tracked, confirming stable water purity. The high sampling frequency and stable baseline demonstrate the analyzer’s suitability for online quality control in demanding environments. Data integrity was ensured through user authentication, audit trails, and secure LAN connectivity.

Benefits and Practical Applications

• Ultralow detection limit (0.1 µg/L) enables early detection of trace organics.
• Automated 10-minute cycle reduces manual sampling and downtime.
• Simple maintenance with tool-free lamp and pump head replacement.
• On-site calibration using an optional vial sampler supports regulatory compliance.
• Web browser access and USB export simplify data retrieval and reporting.
• Integration with LabSolutions™ allows centralized data storage and consolidated reporting across multiple analyzers.

Used Instrumentation

• Shimadzu TOC-1000e online total organic carbon analyzer
• 172 nm excimer UV lamp
• Active-Path™ sample flow design
• LabSolutions™ network data management system

Future Trends and Potential Applications

Emerging demands for ever-higher water purity in advanced semiconductor nodes and biopharmaceutical processes will drive adoption of lower-noise, higher-frequency TOC monitoring. Integration with Industry 4.0 platforms and cloud-based analytics will enable predictive maintenance and real-time quality assurance. Advances in UV oxidation technology and microfluidic sample handling may further reduce footprint and maintenance intervals.

Conclusion

The Shimadzu TOC-1000e delivers sensitive, stable, and fully automated online TOC monitoring for ultra-pure water applications. Its low detection limit, robust data management, and easy maintenance make it a valuable tool for continuous quality control in critical industries.

References

No external literature cited.