Determination of challenging elements in ultrapure semiconductor grade sulfuric acid by Triple Quadrupole ICP-MS
Applications | 2015 | Agilent TechnologiesInstrumentation
ICP/MS, ICP/MS/MS
IndustriesSemiconductor Analysis
ManufacturerAgilent Technologies
Key wordsreaction, icp, elements, sulfuric, semiconductor, ions, difficult, qms, crc, potential, cell, gas, cps, polyatomic, used, product, collision, ppt, reactions, tinh, mass, certification, quadrupole, takahashi, junichi, configurations, removed, cannot, worthwhile, acid, becs, purity, confirm, grade, final, interfered, mode, triple, would, identified, unique, bec, operating, can, historically, first, concentric, pfa, free, octopole
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