Analysis of Ultratrace Impurities in High Silicon Matrix Samples by ICP-QQQ
Applications | 2021 | Agilent Technologies Instrumentation
ICP/MS, ICP/MS/MS
IndustriesSemiconductor Analysis
ManufacturerAgilent Technologies
Key wordssemiconductor, becs, icp, elements, matrix, gas, plasma, bec, silicon, eies, background, omega, lens, trace, deposition, impurities, level, qqq, sampling, used, cool, ppt, bias, foundries, techniquesensure, cone, each, cell, samples, were, multitune, signals, prepared, evolves, suppression, high, recovery, spike, rsd, analyte, element, processes, equivalent, iot, interference, ying, single, widely, industry, needs
Similar PDF
Applications of ICP-MSMeasuring Inorganic Impuritiesin Semiconductor ManufacturingApplication Compendium > Return to table of contents> Search entire documentTable of contentsICP-MS and ICP-QQQ in the Semiconductor Industry4Agilent Has Three Decades of ICP-MS Experience DrivingContinuous Innovation7Agilent ICP-MS Solutions for the Semiconductor Industry8Automating Analysis of...
Key words
return, returncontents, contentsicp, icptable, tablecps, cpsppt, pptgas, gassemiconductor, semiconductorconc, concqqq, qqqbec, becdocument, documententire, entiresearch, searchmode
Ultrapure Process Chemicals Analysis by ICP-QQQ with Hot Plasma Conditions
2021|Agilent Technologies|Applications
Application NoteSemiconductorUltrapure Process Chemicals Analysisby ICP-QQQ with Hot PlasmaConditionsMeeting single- and sub-ppt guideline levels forASTM/SEMI elements in ultrapure water using anAgilent 8900 ICP-QQQAuthorsKazuhiro Sakai and YoshinoriShimamuraAgilent Technologies, Inc.IntroductionContamination control is critical in semiconductor device fabrication (FAB) facilities(1). Contaminants may be...
Key words
semiconductor, semiconductorppt, pptbecs, becsdls, dlselements, elementsicp, icpbec, becultratrace, ultratraceplasma, plasmaeie, eieastm, astmcontaminants, contaminantsupw, upwbackgrounds, backgroundssemi
Technical Overview and Performance Capability of the Agilent 7900s ICP-MS for Semiconductor Applications
2020|Agilent Technologies|Technical notes
White PaperTechnical Overview and PerformanceCapability of the Agilent 7900sICP-MS for Semiconductor ApplicationsIntroductionAgilent ICP-MS systems are widely used for accurate low-level analysis oftrace contaminants across a wide range of high-purity chemicals used in thesemiconductor industry.The first commercial ICP-MS to offer reliable,...
Key words
plasma, plasmaicp, icpcool, coolhot, hotbec, beccou, cousemiconductor, semiconductoragilent, agilentipa, ipapolyatomic, polyatomictive, tiveelements, elementsintelliquant, intelliquantundiluted, undilutedimproved
Determination of Ultratrace Impurities in Semiconductor Photoresist Using ICP-MS/MS
2023|Agilent Technologies|Applications
Application NoteSemiconductorDetermination of Ultratrace Impuritiesin Semiconductor Photoresist UsingICP-MS/MSMonitoring 20 elemental contaminants in ICphotoresist by Agilent 8900 ICP-QQQ after simpledilution in PGMEA solventAuthorsIntroductionYu Ying, Xiangcheng Zeng,Juane SongWith the rapid development of the consumer electronics industry and the expandinguse of computer chips...
Key words
bec, becpgmea, pgmeasemiconductor, semiconductorelement, elementdls, dlsphotoresist, photoresistcontroller, controllerplasma, plasmaicp, icpimpurities, impuritiescalibration, calibrationbecs, becselements, elementsultratrace, ultratracegas