Analysis of Ultratrace Impurities in High Silicon Matrix Samples by ICP-QQQ
Applications | 2021 | Agilent TechnologiesInstrumentation
Agilent TechnologiesKey words
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Measuring Inorganic Impurities in Semiconductor Manufacturing
Applications of ICP-MSMeasuring Inorganic Impuritiesin Semiconductor ManufacturingApplication Compendium> Return to table of contents> Search entire documentTable of contentsICP-MS and ICP-QQQ in the Semiconductor Industry4Agilent Has Three Decades of ICP-MS Experience DrivingContinuous Innovation7Agilent ICP-MS Solutions for the Semiconductor Industry8Automating Analysis of...
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Ultrapure Process Chemicals Analysis by ICP-QQQ with Hot Plasma Conditions
Application NoteSemiconductorUltrapure Process Chemicals Analysisby ICP-QQQ with Hot PlasmaConditionsMeeting single- and sub-ppt guideline levels forASTM/SEMI elements in ultrapure water using anAgilent 8900 ICP-QQQAuthorsKazuhiro Sakai and YoshinoriShimamuraAgilent Technologies, Inc.IntroductionContamination control is critical in semiconductor device fabrication (FAB) facilities(1). Contaminants may be...
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Technical Overview and Performance Capability of the Agilent 7900s ICP-MS for Semiconductor Applications
2020|Agilent Technologies|Technical notes
White PaperTechnical Overview and PerformanceCapability of the Agilent 7900sICP-MS for Semiconductor ApplicationsIntroductionAgilent ICP-MS systems are widely used for accurate low-level analysis oftrace contaminants across a wide range of high-purity chemicals used in thesemiconductor industry.The first commercial ICP-MS to offer reliable,...
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Determination of Ultratrace Impurities in Semiconductor Photoresist Using ICP-MS/MS
Application NoteSemiconductorDetermination of Ultratrace Impuritiesin Semiconductor Photoresist UsingICP-MS/MSMonitoring 20 elemental contaminants in ICphotoresist by Agilent 8900 ICP-QQQ after simpledilution in PGMEA solventAuthorsIntroductionYu Ying, Xiangcheng Zeng,Juane SongWith the rapid development of the consumer electronics industry and the expandinguse of computer chips...
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