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Analysis of Ultratrace Impurities in High Silicon Matrix Samples by ICP-QQQ

Applications | 2021 | Agilent TechnologiesInstrumentation
ICP/MS, ICP/MS/MS
Industries
Semiconductor Analysis
Manufacturer
Agilent Technologies
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Applications of ICP-MS Measuring Inorganic Impurities in Semiconductor Manufacturing Application Compendium > Return to table of contents > Search entire document Table of contents ICP-MS and ICP-QQQ in the Semiconductor Industry 4 Agilent Has Three Decades of ICP-MS Experience Driving…
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Application Note Semiconductor Ultrapure Process Chemicals Analysis by ICP-QQQ with Hot Plasma Conditions Meeting single- and sub-ppt guideline levels for ASTM/SEMI elements in ultrapure water using an Agilent 8900 ICP-QQQ Authors Kazuhiro Sakai and Yoshinori Shimamura Agilent Technologies, Inc. Introduction…
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Application Note Semiconductor Determination of Ultratrace Impurities in Semiconductor Photoresist Using ICP-MS/MS Monitoring 20 elemental contaminants in IC photoresist by Agilent 8900 ICP-QQQ after simple dilution in PGMEA solvent Authors Introduction Yu Ying, Xiangcheng Zeng, Juane Song With the rapid…
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Application Note Semiconductor Analysis of Trace Metal Impurities in High Purity Hydrochloric Acid Using ICP-QQQ Authors Kazuo Yamanaka and Kazuhiro Sakai Agilent Technologies, Japan Introduction Hydrochloric acid (HCl) is a component of the standard RCA cleaning process used to remove…
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