Agilent ICP-MS Journal (August 2021, Issue 85)

Importance of Optimizing ICP-MS Methods and Performance

Over two decades of advances in ICP-MS instrumentation and methodology have raised the standards for trace and ultratrace analysis across semiconductor, environmental, food, and life-science applications. Reliable low-ppt detection of elements in diverse matrices is essential for quality control, regulatory compliance, and research insights. Continuous innovation in plasma conditions, interface geometry, reaction cell chemistries, and consumables underpins improvements in sensitivity, background suppression, and overall robustness.

Objectives and Overview of Issue 85

This special journal issue celebrates nearly 23 years since the first Agilent ICP-MS newsletter. It highlights:

• New ultratrace methods for ultrapure water in semiconductor process control
• Insights into space charge effects and ion transmission
• Consumable workflow guides for regulated water analysis
• Easy-fit pump tubing and an interactive periodic table for standards ordering
• Regulatory updates on heavy metals in baby foods and latest academia news

Methodology and Instrumentation

Key technical features include:

• Agilent 8900 Triple Quadrupole ICP-MS with PFA-100 microflow nebulizer, quartz torch, and optional m-lens for enhanced ion focusing under hot plasma
• Use of normal (hot) and cool plasma modes to balance background suppression and matrix tolerance
• Cell gas modes (He, NH₃+H₂, O₂) to remove interferences on target masses
• Acidified ultrapure water calibration by method of standard additions without blank corrections
• Optimized skimmer cone and ion-lens geometry to minimize space charge dispersion

Main Results and Discussion

Analysis of ultrapure water yielded background equivalent concentrations below 0.5 ppt and detection limits below 0.3 ppt for most regulated elements, meeting ASTM and SEMI requirements. The m-lens demonstrated robust performance in hot plasma, eliminating the need for cool plasma in low-matrix samples. Charge separation in the ion beam was shown to cause mass‐dependent defocusing, with light ions suffering greater transmission loss. Advances in interface design restored uniform sensitivity across the mass range. New easy-fit peristaltic tubing reduced contamination and improved signal stability, while an interactive web-based periodic table simplified standards ordering. A review of heavy metals in baby foods reinforced the need for sensitive ICP-MS protocols compliant with emerging safety limits.

Benefits and Practical Applications

These developments deliver:

• Greater confidence in ppt-level quantitation for semiconductor and environmental monitoring
• Reduced method setup time through guided consumable selection and interactive tools
• Improved long-term stability and reproducibility via optimized tubing and interface components
• Enhanced versatility for high-matrix digests and organic solvent samples

Future Trends and Possible Uses

Emerging directions include:

• Further integration of digital ordering platforms and interactive decision guides
• Next-generation collision/reaction cell chemistries for difficult interferences
• Miniaturized and high-throughput sample introduction systems
• Expanded coupling with chromatographic and hyphenated techniques for speciation
• Continued focus on regulatory compliance in food safety, pharmaceuticals, and emerging contaminants

Conclusion

Issue 85 of the Agilent ICP-MS Journal showcases how optimized instrument design, advanced methodologies, and user-friendly resources converge to push the limits of trace element analysis. By addressing space charge, interference control, consumable management, and regulatory needs, these innovations ensure reliable, high-performance ICP-MS workflows for a broad spectrum of applications.

Reference

ASTM D5127-13 (2018); SEMI F63-0521 (2021); Agilent application notes 5991-7701EN, 5994-2890EN, 5994-3274EN, 5994-3713EN.