Analysis of Metallic Impurities in Specialty Semiconductor Gases Using Gas Exchange Device (GED)-ICP-MS
Applications | 2022 | Agilent TechnologiesInstrumentation
ICP/MS, ICP/MS/MS
IndustriesSemiconductor Analysis
ManufacturerAgilent Technologies
Key wordsged, msag, icp, gas, gaseous, metallic, particles, conc, impurities, gases, semiconductor, particulate, count, introduced, integration, spicp, flow, using, mode, analysis, factor, plasma, specialty, elements, used, detected, standard, ias, sensitivity, sweep, membrane, blank, direct, calculated, caused, nanoparticles, solution, min, technique, mass, higher, software, much, aerosol, qqq, corrected, spectrum, brownian, were, electropolished
Similar PDF
Direct Analysis of Metallic Impurities in SiC and GaN Wafers by LA-GED-MSAG-ICP-MS/MS
2023|Agilent Technologies|Applications
Application Note Semiconductor Direct Analysis of Metallic Impurities in SiC and GaN Wafers by LA-GED-MSAG-ICP-MS/MS Automated analysis using Agilent 8900 ICP-QQQ with Laser Ablation, Gas Exchange Device, and Metal Standard Aerosol Generation Authors Koshi Suzuki, Tatsu Ichinose, and Katsu Kawabata…
Key words
msag, msagsic, sicged, gedwafer, waferablation, ablationgan, ganwafers, wafersgalvo, galvoicp, icpvpd, vpdgas, gasmirror, mirroramount, amountelement, elementtrxrf
Handbook of ICP-QQQ Applications using the Agilent 8800 and 8900
2022|Agilent Technologies|Guides
5th Edition Handbook of ICP-QQQ Applications using the Agilent 8800 and 8900 Primer > Return to table of contents > Search entire document Foreword Agilent Technologies launched its 8800 Triple Quadrupole ICP-MS (ICP-QQQ) at the 2012 Winter Conference on Plasma…
Key words
return, returncontents, contentsicp, icptable, tableqqq, qqqcps, cpsgas, gasmass, masscell, cellppt, pptdocument, documentconc, concentire, entiresearch, searchelements
Measuring Inorganic Impurities in Semiconductor Manufacturing
2022|Agilent Technologies|Guides
Applications of ICP-MS Measuring Inorganic Impurities in Semiconductor Manufacturing Application Compendium > Return to table of contents > Search entire document Table of contents ICP-MS and ICP-QQQ in the Semiconductor Industry 4 Agilent Has Three Decades of ICP-MS Experience Driving…
Key words
return, returncontents, contentsicp, icpcps, cpstable, tableppt, pptgas, gassemiconductor, semiconductorconc, concqqq, qqqbec, becdocument, documententire, entiresearch, searchmode
Elemental and Particle Analysis of N-Methyl-2-Pyrrolidone (NMP) by ICP-MS/MS
2022|Agilent Technologies|Applications
Application Note Semiconductor Elemental and Particle Analysis of N-Methyl-2-Pyrrolidone (NMP) by ICP-MS/MS Analysis of dissolved and particulate inorganic impurities in two grades of NMP using the Agilent 8900 ICP-QQQ Author Introduction Yoshinori Shimamura Ideally, analytical quality control (QC) testing procedures…
Key words
nmp, nmpppt, pptgrade, gradeicp, icpnanoparticle, nanoparticleparticle, particlesemiconductor, semiconductorconc, concgrades, gradeselements, elementsimpurities, impuritiesfabs, fabsnps, npsgas, gasindustry