Agilent ICP-MS Journal (April 2020, Issue 80)

Importance of Topic

In semiconductor fabrication and trace element analysis, even minute contaminants can cause device defects and analytical errors. Ultrapure water (UPW) and robust ICP-MS methods are essential to achieve reliable ultratrace quantification and to maintain instrument performance.

Objectives and Overview

This summary reviews recent Agilent ICP-MS developments presented in the April 2020 ICP-MS Journal issue. Key topics include: acquisition of high-purity water for semiconductor chemicals; a flowing rinse port accessory to reduce contamination; enhancements in ICP-MS MassHunter software (IntelliQuant and nanoparticle data plotting); community events and training resources; and new application notes and webinars to improve data quality.

Methodology and Instrumentation

• Ultrapure water generation using Organo Puric ω UPW systems combined with Agilent 8900 ICP-QQQ for sub-ppt trace element measurements.
• Development of a continuous flowing rinse port accessory for the Agilent Integrated Autosampler (I-AS) to maintain blank stability.
• Implementation of MassHunter revision 4.6 on Agilent 7800, 7900, and 8900 ICP-MS and ICP-QQQ systems.
• Use of Quick Scan full-mass data with IntelliQuant screening and configurable bin sizes for single nanoparticle (sNP) signal distribution plots.

Main Results and Discussion

• Trace element concentrations in UPW from the Organo Puric ω system were all below 1 ppt, demonstrating the system’s suitability for ultratrace analysis.
• Boron contamination in a static rinse bottle rose over six hours, whereas the flowing rinse port maintained stable B blank levels, illustrating the benefits of continuous UPW supply.
• MassHunter IntelliQuant automatically derives semiquantitative responses for all elements, flags potential interferences via a periodic table heat map, and integrates seamlessly with standard quantitative methods.
• Flexible bin sizing in nanoparticle signal distribution plots clarifies size distribution profiles, enhancing single-particle analysis workflows.

Benefits and Practical Applications

• Improved UPW purity and automated rinse port design minimize sample carry-over and laboratory-environment contamination.
• IntelliQuant screening expedites batch analysis by delivering semiquantitative profiles and interference alerts with minimal user setup.
• Customizable nanoparticle plotting parameters support accurate particle sizing in food, environmental, and nano-product development studies.
• Access to updated educational content, webinars, and application notes reinforces best practices and accelerates method adoption.

Future Trends and Opportunities

• Expanded adoption of triple quadrupole ICP-MS for complex matrices, speciation, and isotope dilution workflows.
• Integration of AI-driven diagnostics and remote support to further reduce downtime and optimize maintenance.
• Growth in single-cell and nanomaterial analysis, requiring continued advances in software processing and data visualization.
• Ongoing development of UPW generation and delivery systems to meet more stringent purity requirements in semiconductor and life-science applications.

Conclusion

Agilent’s combined innovations in ultrapure water delivery, autosampler accessories, and MassHunter software enhancements deliver significant gains in data quality, workflow efficiency, and contamination control. Continued community support and educational resources ensure laboratories can implement these solutions effectively and maintain high-confidence ICP-MS analyses.

Instrument Details

Agilent ICP-MS and ICP-QQQ models: 7800, 7900, 8900, and 8800 series equipped with Integrated Autosampler (I-AS) and MassHunter software Revision 4.6.