Applications from the field of Semiconductor Analysis - page 1

Equipment Used in Semiconductor Manufacturing Processes and Evaluation Examples

Brochures and specifications

| 2025 | Shimadzu

GC/MSD, TOC, LC/MS, LC/MS/MS, LC/QQQ, GC/SQ, Microscopy, FTIR Spectroscopy, X-ray, Mechanical testing, HPLC, Elemental Analysis, UV–VIS spectrophotometry

Instrumentation

GC/MSD, TOC, LC/MS, LC/MS/MS, LC/QQQ, GC/SQ, Microscopy, FTIR Spectroscopy, X-ray, Mechanical testing, HPLC, Elemental Analysis, UV–VIS spectrophotometry

Manufacturer

Shimadzu

Industries

Semiconductor Analysis

Online monitoring of sulfuric acid and hydrogen peroxide using Raman spectroscopy

Applications

| 2023 | Metrohm

RAMAN Spectroscopy

Instrumentation

RAMAN Spectroscopy

Manufacturer

Metrohm

Industries

Semiconductor Analysis

Measuring Inorganic Impurities in Semiconductor Manufacturing

Guides

| 2022 | Agilent Technologies

GC, ICP/MS, Speciation analysis, ICP/MS/MS

Instrumentation

GC, ICP/MS, Speciation analysis, ICP/MS/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

Measuring the optical properties of photovoltaic cells using the Agilent Cary 5000 UV-Vis-NIR spectrophotometer and the External DRA-2500

Applications

| 2011 | Agilent Technologies

NIR Spectroscopy, UV–VIS spectrophotometry

Instrumentation

NIR Spectroscopy, UV–VIS spectrophotometry

Manufacturer

Agilent Technologies

Industries

Materials Testing, Semiconductor Analysis

Quality control of semiconductor acid baths as per ASTM E1655 – Time- and cost-efficient with NIRS

Technical notes

| 2021 | Metrohm

NIR Spectroscopy

Instrumentation

NIR Spectroscopy

Manufacturer

Metrohm

Industries

Semiconductor Analysis

Sub-ppb detection limits for hydride gas contaminants using GC-ICP-QQQ

Applications

| 2015 | Agilent Technologies

GC, Speciation analysis, ICP/MS/MS

Instrumentation

GC, Speciation analysis, ICP/MS/MS

Manufacturer

Agilent Technologies

Industries

Energy & Chemicals , Semiconductor Analysis

Damage-free failure/defect analysis in electronics and semiconductor industries using micro-ATR FTIR imaging

Applications

| 2014 | Agilent Technologies

FTIR Spectroscopy

Instrumentation

FTIR Spectroscopy

Manufacturer

Agilent Technologies

Industries

Materials Testing, Semiconductor Analysis

Determination of Trace Impurities in Electronic Grade Arsine by GC-ICP-QQQ

Applications

| 2020 | Agilent Technologies

GC, ICP/MS, Speciation analysis, ICP/MS/MS

Instrumentation

GC, ICP/MS, Speciation analysis, ICP/MS/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

Evaluating Silicon using Raman Microscopy

Applications

| 2024 | Thermo Fisher Scientific

RAMAN Spectroscopy, Microscopy

Instrumentation

RAMAN Spectroscopy, Microscopy

Manufacturer

Thermo Fisher Scientific

Industries

Materials Testing, Semiconductor Analysis

Gas chromatographic separation of metal carbonyls in carbon monoxide with detection using the Agilent 8800 ICP-QQQ

Applications

| 2016 | Agilent Technologies

GC, ICP/MS, Speciation analysis, ICP/MS/MS

Instrumentation

GC, ICP/MS, Speciation analysis, ICP/MS/MS

Manufacturer

Agilent Technologies

Industries

Energy & Chemicals , Semiconductor Analysis