Improvement of ICP-MS detectability of phosphorus and titanium in high purity silicon samples using the Agilent 8800 Triple Quadrupole ICP-MS
Applications
| 2013 | Agilent Technologies
ICP/MS, ICP/MS/MS
Instrumentation
ICP/MS, ICP/MS/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis
Analysis of Volatile Metalloid Species in Gas Samples using a Commercial Cryotrapping System (TDS-G-CIS GC) Coupled to ICP-MS with PH3 and SF6 as Example Compounds