Direct Analysis of Metallic Impurities in SiC and GaN Wafers by LA-GED-MSAG-ICP-MS/MS
Applications
| 2023 | Agilent Technologies
ICP/MS, ICP/MS/MS, Laser ablation
Instrumentation
ICP/MS, ICP/MS/MS, Laser ablation
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis