Analysis of Metallic Impurities in Specialty Semiconductor Gases Using Gas Exchange Device (GED)-ICP-MS
Applications
| 2022 | Agilent Technologies
ICP/MS, ICP/MS/MS
Instrumentation
ICP/MS, ICP/MS/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis
Analysis of Volatile Metalloid Species in Gas Samples using a Commercial Cryotrapping System (TDS-G-CIS GC) Coupled to ICP-MS with PH3 and SF6 as Example Compounds