Applications from the field of Semiconductor Analysis - page 1

Carbon and Oxygen Quantification in Silicon wafers

Applications
| 2021 | Bruker Optics
FTIR Spectroscopy
Instrumentation
FTIR Spectroscopy
Manufacturer
Bruker
Industries
Semiconductor Analysis

Quality control of semiconductor acid baths as per ASTM E1655 – Time- and cost-efficient with NIRS

Technical notes
| 2021 | Metrohm
NIR Spectroscopy
Instrumentation
NIR Spectroscopy
Manufacturer
Metrohm
Industries
Semiconductor Analysis

Characterization of Amorphous and Microcrystalline Silicon using Raman Spectroscopy

Applications
| 2009 | Thermo Fisher Scientific
RAMAN Spectroscopy, Microscopy
Instrumentation
RAMAN Spectroscopy, Microscopy
Manufacturer
Thermo Fisher Scientific
Industries
Materials Testing, Semiconductor Analysis

Routine determination of ultratrace elements in semiconductor grade nitric acid by the Thermo Scientific iCAP RQ ICP-MS

Applications
| 2017 | Thermo Fisher Scientific
ICP/MS
Instrumentation
ICP/MS
Manufacturer
Thermo Fisher Scientific
Industries
Semiconductor Analysis

Ultrapure Process Chemicals Analysis by ICP-QQQ with Hot Plasma Conditions

Applications
| 2021 | Agilent Technologies
ICP/MS, ICP/MS/MS
Instrumentation
ICP/MS, ICP/MS/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis

Basic Performance of the Agilent 7700s ICP-MS for the Analysis of Semiconductor Samples

Technical notes
| 2010 | Agilent Technologies
ICP/MS
Instrumentation
ICP/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis

Determination of Trace Impurities in Electronic Grade Arsine by GC-ICP-QQQ

Applications
| 2020 | Agilent Technologies
GC, ICP/MS, Speciation analysis, ICP/MS/MS
Instrumentation
GC, ICP/MS, Speciation analysis, ICP/MS/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis

Direct Analysis of Photoresist and Related Solvents Using the Agilent 7500cs ICP-MS

Applications
| 2004 | Agilent Technologies
ICP/MS
Instrumentation
ICP/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis

Agilent ICP-MS Journal (November 2019. Issue 78)

Others
| 2019 | Agilent Technologies
ICP/MS, ICP/MS/MS
Instrumentation
ICP/MS, ICP/MS/MS
Manufacturer
Agilent Technologies
Industries
Environmental, Semiconductor Analysis

Evaluating Silicon using Raman Microscopy

Applications
| 2024 | Thermo Fisher Scientific
RAMAN Spectroscopy, Microscopy
Instrumentation
RAMAN Spectroscopy, Microscopy
Manufacturer
Thermo Fisher Scientific
Industries
Materials Testing, Semiconductor Analysis
Other projects
GCMS
LCMS
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