Direct Analysis of Metallic Impurities in SiC and GaN Wafers by LA-GED-MSAG-ICP-MS/MS
Applications
| 2023 | Agilent Technologies
ICP/MS, ICP/MS/MS, Laser ablation
Instrumentation
ICP/MS, ICP/MS/MS, Laser ablation
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis
WCPS: Ultratrace Analysis of Phosphorus, Boron and Other Impurities in Photovoltaic Silicon and Trichlorosilane by ICP-MS with High Energy Collision Cell
Posters
| 2011 | Agilent Technologies
ICP/MS
Instrumentation
ICP/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis
Determination of Ultratrace Impurities in Semiconductor Photoresist Using ICP-MS/MS
Applications
| 2023 | Agilent Technologies
ICP/MS, ICP/MS/MS
Instrumentation
ICP/MS, ICP/MS/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis
Technical Overview and Performance Capability of the Agilent 7900s ICP-MS for Semiconductor Applications
Technical notes
| 2020 | Agilent Technologies
ICP/MS
Instrumentation
ICP/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis
Ultratrace Analysis of Solar (Photovoltaic) Grade Bulk Silicon by ICP-MS
Applications
| 2008 | Agilent Technologies
ICP/MS
Instrumentation
ICP/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis
Basic Performance of the Agilent 7700s ICP-MS for the Analysis of Semiconductor Samples