Applications from the field of Semiconductor Analysis | LabRulez ICPMS

Agilent ICP-MS Journal (November 2021, Issue 86)

Others

| 2021 | Agilent Technologies

Ion chromatography, IC-MS, ICP/MS, ICP/MS/MS

Instrumentation

Ion chromatography, IC-MS, ICP/MS, ICP/MS/MS

Manufacturer

Agilent Technologies, Metrohm, CEM

Industries

Environmental, Food & Agriculture, Semiconductor Analysis

Determination of Ultratrace Impurities in Semiconductor Photoresist Using ICP-MS/MS

Applications

| 2023 | Agilent Technologies

ICP/MS, ICP/MS/MS

Instrumentation

ICP/MS, ICP/MS/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

Trace Elemental Analysis of Trichlorosilane by Agilent ICP-MS

Applications

| 2021 | Agilent Technologies

ICP/MS

Instrumentation

ICP/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

Direct Measurement of Metallic Impurities in 20% Ammonium Hydroxide by 7700s/7900 ICP-MS

Applications

| 2017 | Agilent Technologies

ICP/MS

Instrumentation

ICP/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

Characterization of Surface Metal Contamination on Silicon Wafers Using Surface Metal Extraction Inductively Coupled Plasma Mass Spectrometry (SME- ICP-MS)

Applications

| 2001 | Agilent Technologies

ICP/MS

Instrumentation

ICP/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

The deep ultraviolet spectroscopic properties of a next-generation photoresist

Applications

| 2011 | Agilent Technologies

UV–VIS spectrophotometry

Instrumentation

UV–VIS spectrophotometry

Manufacturer

Agilent Technologies

Industries

Materials Testing, Semiconductor Analysis

Optical Characterization of Materials Using Spectroscopy

Guides

| 2023 | Agilent Technologies

NIR Spectroscopy, UV–VIS spectrophotometry

Instrumentation

NIR Spectroscopy, UV–VIS spectrophotometry

Manufacturer

Agilent Technologies

Industries

Energy & Chemicals , Materials Testing, Semiconductor Analysis

Agilent ICP-MS Journal (March 2012 – Issue 49)

Others

| 2012 | Agilent Technologies

ICP/MS, ICP/MS/MS

Instrumentation

ICP/MS, ICP/MS/MS

Manufacturer

Agilent Technologies

Industries

Energy & Chemicals , Semiconductor Analysis

Analysis of Ultratrace Impurities in High Silicon Matrix Samples by ICP-QQQ

Applications

| 2021 | Agilent Technologies

ICP/MS, ICP/MS/MS

Instrumentation

ICP/MS, ICP/MS/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

Lowering the Cost of Fluoropolymer Components in Semiconductor Manufacturing

Technical notes

| 2021 | Savillex

Consumables

Instrumentation

Consumables

Manufacturer

Savillex

Industries

Semiconductor Analysis

Applications from the field of Semiconductor Analysis | LabRulez ICPMS

Agilent ICP-MS Journal (November 2021, Issue 86)

Determination of Ultratrace Impurities in Semiconductor Photoresist Using ICP-MS/MS

Trace Elemental Analysis of Trichlorosilane by Agilent ICP-MS

Direct Measurement of Metallic Impurities in 20% Ammonium Hydroxide by 7700s/7900 ICP-MS

Characterization of Surface Metal Contamination on Silicon Wafers Using Surface Metal Extraction Inductively Coupled Plasma Mass Spectrometry (SME- ICP-MS)

The deep ultraviolet spectroscopic properties of a next-generation photoresist

Optical Characterization of Materials Using Spectroscopy

Agilent ICP-MS Journal (March 2012 – Issue 49)

Analysis of Ultratrace Impurities in High Silicon Matrix Samples by ICP-QQQ

Lowering the Cost of Fluoropolymer Components in Semiconductor Manufacturing

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