Applications from the field of Semiconductor Analysis - page 6

Quality control of semiconductor acid baths as per ASTM E1655 – Time- and cost-efficient with NIRS

Technical notes

| 2021 | Metrohm

NIR Spectroscopy

Instrumentation

NIR Spectroscopy

Manufacturer

Metrohm

Industries

Semiconductor Analysis

Direct Measurement of Metallic Impurities in 20% Ammonium Hydroxide by 7700s/7900 ICP-MS

Applications

| 2017 | Agilent Technologies

ICP/MS

Instrumentation

ICP/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

Direct Analysis of Photoresist and Related Solvents Using the Agilent 7500cs ICP-MS

Applications

| 2004 | Agilent Technologies

ICP/MS

Instrumentation

ICP/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

The deep ultraviolet spectroscopic properties of a next-generation photoresist

Applications

| 2011 | Agilent Technologies

UV–VIS spectrophotometry

Instrumentation

UV–VIS spectrophotometry

Manufacturer

Agilent Technologies

Industries

Materials Testing, Semiconductor Analysis

Characterization of Surface Metal Contamination on Silicon Wafers Using Surface Metal Extraction Inductively Coupled Plasma Mass Spectrometry (SME- ICP-MS)

Applications

| 2001 | Agilent Technologies

ICP/MS

Instrumentation

ICP/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

Analysis of semiconductor grade mineral acids

Applications

| 2018 | Thermo Fisher Scientific

ICP/MS

Instrumentation

ICP/MS

Manufacturer

Thermo Fisher Scientific

Industries

Semiconductor Analysis

Ultra-low level determination of phosphorus, sulfur, silicon and chlorine using the Agilent 8900 ICP-QQQ

Applications

| 2018 | Agilent Technologies

ICP/MS, ICP/MS/MS

Instrumentation

ICP/MS, ICP/MS/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

Routine determination of ultratrace elements in semiconductor grade nitric acid by the Thermo Scientific iCAP RQ ICP-MS

Applications

| 2017 | Thermo Fisher Scientific

ICP/MS

Instrumentation

ICP/MS

Manufacturer

Thermo Fisher Scientific

Industries

Semiconductor Analysis

Characterization of Trace Impurities in Silicon Wafers by High Sensitivity Reaction Cell ICP-MS

Applications

| 2003 | Agilent Technologies

ICP/MS

Instrumentation

ICP/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

Analysis of 50 nm Silica Nanoparticles in Semiconductor Process Chemicals by spICP-MS/MS

Applications

| 2023 | Agilent Technologies

ICP/MS, ICP/MS/MS

Instrumentation

ICP/MS, ICP/MS/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis