Carbon and Oxygen Quantification in Silicon wafers
Applications
| 2021 | Bruker Optics
FTIR Spectroscopy
Instrumentation
FTIR Spectroscopy
Manufacturer
Bruker
Industries
Semiconductor Analysis
Characterization of Surface Metal Contamination on Silicon Wafers Using Surface Metal Extraction Inductively Coupled Plasma Mass Spectrometry (SME- ICP-MS)
Applications
| 2001 | Agilent Technologies
ICP/MS
Instrumentation
ICP/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis
Determination of Trace Impurities in Electronic Grade Arsine by GC-ICP-QQQ
Applications
| 2020 | Agilent Technologies
GC, ICP/MS, Speciation analysis, ICP/MS/MS
Instrumentation
GC, ICP/MS, Speciation analysis, ICP/MS/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis
Automated Analysis of Ultratrace Elemental Impurities in Isopropyl Alcohol
Applications
| 2022 | Agilent Technologies
ICP/MS, ICP/MS/MS
Instrumentation
ICP/MS, ICP/MS/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis
WCPS: Efficient Removal of Polyatomic Ions by ICP-MS Equipped with Novel Reaction Cell: Examples of Highly Purified Chemicals Used for Semiconductor
Posters
| 2012 | Agilent Technologies
ICP/MS, ICP/MS/MS
Instrumentation
ICP/MS, ICP/MS/MS
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis
Technical Overview and Performance Capability of the Agilent 7900s ICP-MS for Semiconductor Applications