Applications from the field of Semiconductor Analysis - page 3

Ultrapure Process Chemicals Analysis by ICP-QQQ with Hot Plasma Conditions

Applications

| 2021 | Agilent Technologies

ICP/MS, ICP/MS/MS

Instrumentation

ICP/MS, ICP/MS/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

Direct Measurement of Metallic Impurities in 20% Ammonium Hydroxide by 7700s/7900 ICP-MS

Applications

| 2017 | Agilent Technologies

ICP/MS

Instrumentation

ICP/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

Automated Surface Analysis of Metal Contaminants in Silicon Wafers by Online VPD-ICP-MS/MS

Applications

| 2023 | Agilent Technologies

ICP/MS, ICP/MS/MS

Instrumentation

ICP/MS, ICP/MS/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

Automated Analysis of Semiconductor Grade Hydrogen Peroxide and DI Water using ICP-QQQ

Applications

| 2018 | Agilent Technologies

ICP/MS, ICP/MS/MS

Instrumentation

ICP/MS, ICP/MS/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

Agilent ICP-MS Journal (July 2017 – Issue 69)

Others

| 2017 | Agilent Technologies

ICP/MS

Instrumentation

ICP/MS

Manufacturer

Agilent Technologies

Industries

Environmental, Pharma & Biopharma, Semiconductor Analysis

Agilent ICP-MS Journal (April 2020, Issue 80)

Others

| 2020 | Agilent Technologies

Software, ICP/MS, ICP/MS/MS

Instrumentation

Software, ICP/MS, ICP/MS/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis

Reaching sub-ppm limits of detection for carbon, nitrogen and oxygen with the Element GD Plus GD-MS

Applications

| 2023 | Thermo Fisher Scientific

Elemental Analysis

Instrumentation

Elemental Analysis

Manufacturer

Thermo Fisher Scientific

Industries

Semiconductor Analysis

Determination of ultratrace elements on silicon wafer surfaces using the Thermo Scientific iCAP TQs ICP-MS

Applications

| 2018 | Thermo Fisher Scientific

ICP/MS, ICP/MS/MS

Instrumentation

ICP/MS, ICP/MS/MS

Manufacturer

Thermo Fisher Scientific

Industries

Semiconductor Analysis

Routine determination of ultratrace elements in semiconductor grade nitric acid by the Thermo Scientific iCAP RQ ICP-MS

Applications

| 2017 | Thermo Fisher Scientific

ICP/MS

Instrumentation

ICP/MS

Manufacturer

Thermo Fisher Scientific

Industries

Semiconductor Analysis

Determination of Trace Metal Impurities in Semiconductor Grade Phosphoric Acid by High Sensitivity Reaction Cell ICP-MS

Applications

| 2003 | Agilent Technologies

ICP/MS

Instrumentation

ICP/MS

Manufacturer

Agilent Technologies

Industries

Semiconductor Analysis