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Ultra trace measurement of potassium and other elements in ultrapure water using the Agilent 8800 ICP-QQQ in cool plasma reaction cell mode

 

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Application Note Semiconductor Ultrapure Process Chemicals Analysis by ICP-QQQ with Hot Plasma Conditions Meeting single- and sub-ppt guideline levels for ASTM/SEMI elements in ultrapure water using an Agilent 8900 ICP-QQQ Authors Kazuhiro Sakai and Yoshinori Shimamura Agilent Technologies, Inc. Introduction…
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